Description
SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) are communication interface protocols for communication between a semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitoring equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 - HSMS) or RS-232 (using SEMI standard E4 - SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products and change variables. With SECS/GEM, all this can be performed in a standard way. In simple words, the SECS/GEM standard defines messages, state machines and scenarios to enable factory host applications to control as well as monitor manufacturing equipment. GEM standard is officially designated as SEMI standard E30, but frequently referred to as the GEM or SECS/GEM standard. The GEM is beneficial for both device manufacturers and equipment suppliers as it defines common set of equipment behavior and communication capabilities to provide functionality as well as flexibility to support manufacturing. Since GEM standard has only a few semiconductor-specific features, it has been adopted by other manufacturing industries as well, such as PV. Among the capabilities offered by the SECS/GEM standard is - • For fab host to start and stop processing • For fab host to select, download and upload recipes from/to the equipment • For fab host to query the equipment for values of various process parameters and equipment configuration • For fab host to set equipment configuration parameter values • For equipment to send alarms to the fab host More information:- https://www.einnosys.com/introduction-secs-gem/
SECS GEM
