dstcsemi
https://www.dstcsemi.com/products/silicon-susceptor/
The sic susceptor from DSTC is utilized in semiconductor CVD and PVD machines to provide support for wafers during high-temperature processes, ensuring stability and preventing any potential damage caused by nitrogen flow or accidental dropping. Compared to SiC Susceptor, silicon carbide susceptor has the same material as the wafer, the same coefficient of thermal expansion, and a shorter delivery time.
Additionally, Silicon Susceptor can also be utilized as a wafer carrier in semiconductor etching equipment.
Features of DSTC Silicon Susceptor
1
Ultra-Thin High Purity Design: The minimum thickness of DSTC silicon susceptor reaches 1mm, which is high purity; It is also recyclable and reusable.
2
Self-Developed Cleaning Technology: Self-developed cleaning technology, the surface metal ion of DSTC silicon susceptor residue meets the requirements of silicon wafer treatment process.
3
Mature Processing Technique: DSTC boasts a mature processing technique for silicon susceptors, ensuring high quality and reliability of your products.
Silicon Susceptor's Applications in Semiconductor Processing
High Purity and High Density: The silicon susceptor from DSTC is processed from high-purity silicon material with high purity and high density, ensuring that the wafer is not contaminated by impurities during processing.